本书涉及半导体器件、半导体工艺、集成电路、微型机电系统（MEMS）等微电子技术的基础知识，旨在逐步提高学生的阅读、理解和翻译微电子技术专业书刊资料的能力，为学生今后能够以英语为工具，获取和交流专业技术信息打下较好的基础。
本书注重选用不同类型的各种资料，有教材、科普资料、设备说明书等，并附上了很多插图，力求达到较好的教学效果。
本书适合作为本科院校、函授学院、高等职业院校的微电子技术专业教材，也可作为其他电类专业学生的参考用书。

Unit 1 A Brief Introduce to Microelectronic Technology
1.1 History About Microelectronics
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Technical words and Phrases
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Exercises
1.2 Introduction To Some Courses
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Exercises
1.3 Reading Materials
1.4 Unit Exercises
Unit 2 Semiconductor Device
2.1 Semiconductor Diode
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Exercises
2.2 Transistors
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Exercises
2.3 Microwave and Photonic devices
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Exercises
2.4 Reading Materials
2.5 Unit Exercises
Unit 3 Micro-electronic Technology
3.1 Crystal Growth
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Exercises
3.2 Film Growth
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Exercises
3.3 Photolithography
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3.4 Oxide Growth
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3.5 Diffusion and Ion Implantation
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Exercises
3.6 Etching
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3.7 Reading Material
3.8 Unit Exercises
Unit 4 Integrated Circuits
4.1 Introduction of Integrated Circuits
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Exercises
4.2 Integrated circuit design and verification
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Exercises
4.3 Introduction of Cadence Tools
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Exercises
4.4 Reading Materials
4.5 Unit Exercises
Unit 5 Microelectronic Mechanical Systems (MEMS)
5.1 Introduction to MEMS
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Exercises
5.2 Materials for MEMS
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Exercises
5.3 Processes for Micromachining
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5.4 Reading Materials
5.5 Unit Exercises
Unit 6 Scientific and Technological Papers
6.1 Film Thickness Tester
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Exercises
6.2 WL13A0G10 Test System Option Manual
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Exercises
6.3 Reading Materials
6.4 Unit Exercises
Appendix Technical Vocabulary
Reference