本书是21世纪科技前沿丛书之一，全英文版，涵盖的范围包括共聚焦光学显微镜、扫描近场光学显微镜、各种扫描探针显微术、离子显微镜等，共有10个专题。本书力图使读者对所叙述的方法有一个概念上的理解，而不是只停留在对理论的堆砌上。在每一个专题里，都会叙述相关的实例及其应用并加以讨论，使读者对每种显微技术都能明了和理解；还会进一步展示各章之间的内在联系，表明每一种技术如何在综合性的、复杂的测试中各自扮演独特的角色，解决具体的问题。

现代显微学在纳米技术领域的研究和发展中起到“眼睛”和“手”的功能。迄今，人们仍在孜孜不倦地寻找纳米尺度上的“火眼金睛”。本手册的目的在于提供关于各种显微学的原理及其在该迅猛发展的领域内应用的综述参考书。本手册共有22个专题，每一专题都由不同研究领域的、处于世界前沿的科学家撰写。本书是第1卷，涵盖的范围包括共聚焦光学显微镜、扫描近场光学显微镜、各种扫描探针显微术、离子显微镜等，共有10个专题。本书力图使读者对所叙述的方法有一个概念上的理解，而不是只停留在对理论的堆砌上。在每一个专题里，都会叙述相关的实例及其应用并加以讨论，使读者对每种显微技术都能明了和理解；还会进一步展示各章之间的内在联系，表明每一种技术如何在综合性的、复杂的测试中各自扮演独特的角色，解决具体的问题。

List of Contributors

Confocal Scanning Optical Microscopy and Nanotechnology

1.1 Introduction

1.2 The Confocal Microscope

    1.2.1 Principles of Confocal Microscopy

    1.2.2 Instrumentation

    1.2.3 Techniques for Improving Imaging

         of Nanoscale Materials

1.3 Applications to Nanotechnology

    1.3.1 Three-Dimensional Systems

    1.3.2 Two-Dimensional Systems

    1.3.3 One-Dimensional Systems

    1.3.4 Zero-Dimensional Systems

1.4 Summary and Future Perspectives

References

2 Scanning Near-Field Optical Microscopy in Nanosciences

2.1 Scanning Near-Field Optical Microscopy and Nanotechnology ...

2.2 Basic Concepts

2.3 Instrumentation

    2.3.1 Probe Fabrication

    2.3.2 Flexibility of Near-Field Measurements

2.4 Applications in Nanoscience

    2.4.1 Fluorescence Microscopy

    2.4.2 Raman Microscopy

    2.4.3 Plasmonic and Photonic Nanostructures

    2.4.4 Nanolithography

    2.4.5 Semiconductors

2.5 Perspectives

References

Scanning Tunneling Microscopy

3.1 Basic Principles of Scanning Tunneling Microscopy

    3.1.1 Electronic Tunneling

    3.1.2 Scanning Tunneling Microscope

3.2 Surface Structure Determination by Scanning

    Tunneling Microscopy

    3.2.1 Semiconductor Surfaces

    3.2.2 Metal Surfaces

    3.2.3 Insulator Surfaces

    3.2.4 Nanotubes and Nanowires

    3.2.5 Surface and Subsurface Dynamic Processes

3.3 Scanning Tunneling Spectroscopies

    3.3.1 Scanning Tunneling Spectroscopy

    3.3.2 Inelastic Tunneling Spectroscopy

    3.3.3 Local Work Function Measurement

3.4 STM-Based Atomic Manipulation

    3.4.1 Manipulation of Single atoms

    3.4.2 STM Induced Chemical Reaction at Tip

3.5 Recent Developments

    3.5.1 Spin-Polarized STM

    3.5.2 Ultra-Low Temperature-STM

    3, 5.3 Dual-Tip STM

    3.5.4 Variable Temperature Fast-Scanning STM

References

4 Visualization of Nanostructures with Atomic Force Microscopy

4.1 Introductory Remarks

4.2 Basics of Atomic Force Microscopy

    4.2.1 Main Principle and Components of Atomic

         Force Microscope

    4.2.2 Operational Modes, Optimization of the Experimen!

         and Image Resolution

    4.2.3 Imaging in Various Environments and

         at Different Temperatures

4.3 Imaging of Macromolecules and Their Self-Assemblies

    4.3.1 Visualization of Single Polymer Chains

    4.3.2 Alkanes, Polyethylene and Fluoroalkanes

4.4 Studies of Heterogeneous Systems

    4.4.1 Semicrystalline Polymers

    4.4.2 Block Copolymers

    4.4.3 Polymer Blends and Nanocomposites

4.5 Concluding Remarks

References

5 Scanning Probe Microscopy for Nanoscale

Manipulation and Patterning

5.1 Introduction

    5.1.1 Nanoscale Toolbox for Nanotechnologists

    5.1.2 Motivations

5.2 Nanoscale Pen Writing

    5.2.1 Dip-Pen Nanolithography

    5.2.2 Nanoscale Printing of Liquid Ink

5.3 Nanoscale Scratching

    5.3.1 Nanoscale Indentation

    5.3.2 Nanografting

    5.3.3 Nanoscale Melting

5.4 Nanoscale Manipulation

    5.4.1 Atomic and Molecular Manipulation

    5.4.2 Manipulation of Nanostructures

    5.4.3 Nanoscale Tweezers

5.5 Nanoscale Chemistry

    5.5.1 Nanoscale Oxidation

    5.5.2 Nanoscale Desorption of Self-Assembled

         Monolayers

    5.5.3 Nanoscale Chemical Vapor Deposition

5.6 Nanoscale Light Exposure

5.7 Future Perspectives

References

6 Scanning Thermal and Thermoelectric Microscopy

6.1 Introduction

6.2 Instrumentation of Scanning Thermal and

    Thermoelectric Microscopy

    6.2.1 Instrumentation of Scanning Thermal Microscopy

    6.2.2 Instrumentation of Scanning

         Thermoelectric Microscopy

6.3 Theory of Scanning Thermal and Thermoelectric Microscopy

    6.3.1 Theory of Scanning Thermal Microscopy

    6.3.2 Theory of Scanning Thermoelectric Microscopy

  6.4 Applications of Scanning Thermal and Thermoelectric

    Microscopy in Nanotechnology

    6.4.1 Thermal Imaging of Carbon Nanotube Electronics

    6.4.2 Thermal Imaging of ULSI Devices and

         Interconnects

    6.4.3 Shallow Junction Profiling

  6.5 Summary and Future Aspects

  References

  Imaging Secondary Ion Mass Spectrometry

  7.1 Secondary Ion Mass Spectrometry and Nanotechnology

  7.2 Introduction to Secondary Ion Mass Spectrometry

    7.2.1  Ove~rview

    7.2.2 General SIMS Instruments

    7.2.3 High Resolution Imaging SIMS Instruments

7.3 Experimental Issues in Imaging SIMS

7.4 Applications in Nanotechnology

    7.4.1 Example--Precipitate Distributions in Metallurgy 

    7.4.2 Example--Heterogeneous Catalyst Studies

    7.4.3 Example--Nanoscale Biological Structures

7.5 Summary and Future Perspectives

References

8 Atom Probe Tomography

8.1 Atom Probe Tomography and Nanotechnology

8.2 Instrumentation of Atom Probe Tomography

    8.2.1 Field Ion Microscope

    8.2.2 Types of Atom Probe

    8.2.3 Specimen Preparation

8.3 Basic Information

8.4 Data Interpretation and Visualization

    8.4.1 Visualization Methods

    8.4.2 Quantification Methods

8.5 Sample Analysis of Nanomaterials: Multilayer Films

8.6 Summary and Future Perspectives

References

9 Focused Ion Beam System--a Multifunctional Tool for

Nanotechnology

9. 1 Introduction

9.2 Principles and Practice of the Focused Ion Beam System

   9.2.1 Ion Beam Versus Electron Beam

   9.2.2 Focused Ion Beam Microscope Versus

       Scanning Electron Microscope

  9.2.3 Milling

  9.2.4 Deposition

  9.2.5 Implantation

  9.2.6 Imaging

  9.2.7 The Dual-Beam System

9.3 Application of Focused Ion Beam Instrumentation

  9.3.1 Surface Structure Modification

  9.3.2 Transmission Electron Microscopy Sample preparation

       for imaging and analysis

  9.3.3 Sample Imaging--Defining the Third Dimension

  9.3.4 Damage to the Sample Induced by

       the Focused Ion Beam

  References

10 Electron Beam Lithography

 10.1 Electron Beam Lithography and Nanotechnology

 10.2 Instrumentation of Electron Beam Lithography

     10.2.1 Principle

     10.2.2 Electron Optics

 10.3 Electron-Solid Interactions

     10.3.1 Electron Scattering in Solid

     10.3.2 Proximity Effect

     10.3.3 Electron Beam Resists

 10.4 Pattern Transfer Process

     10.4.1 Additive Processes

     10.4.2 Subtractive Processes

 10.5 Applications in Nanotechnology

     10.5.1 Mask Making

     10.5.2 Direct Writing

 10.6 Summary and Future Perspectives

References

Index