1 Semiconductor wafer fabrication system
1.1 Semiconductor Manufacturing Industry
1.1.1 Development and Current Status of the Semiconductor
Manufacturing Industry
1.1.2 Future ChaUen.es in the Semiconductor Manufacturing
Industry
1.2 Processing of Semiconductor Chips
1.2.1 Wafer Preparation
1.2.2 Wafer Fabrication
1.2 ,3 Wafer Sort
1.2.4 Chip Packaging
1.2.5 Chip Final Measurement
1.3 Constitution of the Semiconductor Wafer Fabrication System
1.3.1 Wafer Processing System
1.3.2 Material Handling System
1.4 Production Scheduling in the Semiconductor Wafer Fabrication
System
References
2 Automated material handling systems in SWFSs
2.1 Development of Material Handling Systems in SWFSs
2.1.1 Semi-automated Material Handling Systems
2.1.2 Automated Material Handling Systems
2.1.3 Intelligent Material Handling Systems
2.2 Components of the Automated Material Handling
System
2.2.1 Carriers
2.2.2 Transport System
2.2.3 Storage System
2.2.4 Tracking System
2.2.5 Control System
2.3 Layout of the Automated Material Handling System
2.3.1 Single-spine Configuration
2.3.2 Double-spine Configuration
2.3.3 Integrated Configuration
2.3.4 Perimeter Configuration
2.3.5 Mixed Configuration
2.4 Features of the Automated Material Handling System
References
3 Modeling methods of automated material
handling systems in SWFSs
3.1 Modeling Methods Based on the Network Flow
3.1.1 Basic Theory of the Network Flow Model
3.1.2 Network Flow Modeling Process for AMHSs
3.2 Modeling Methods Based on the Queuing Theory
3.2.1 Basic Theory of the Queuing Theory Model
3.2.2 Queuing Theory Modeling Process for AMHSs
3.3 Modeling Methods Based on Mathematical Programming
3.3.1 The Mathematical Programming Model
3.3.2 Mathematical Programming Modeling Process for AMHSs
3.4 Modeling Methods Based on the Markov Model 3.4.1 Basic Theory of the Markov Model
3.4.2 Markov Modeling Process for AMHSs
3.5 Modeling Methods Based on Simulation
3.5.1 Basic Theory of the Simulation Model
3.5.2 Simulation Modeling Process for AMHSs
3.6 Modeling Methods Based on the Petri Net
3.6.1 Basic Theory of the Petri Net Model
3.6.2 Petri Net Modeling Process for AMHSs
3.7 Conclusion
References
4 Analysis of automated material handling systems
in SWFSs
4.1 Running Process Description
4.2 Methods for Analyzing Running Characteristics
4.3 Modified Markov Chain Model
4.3.1 Notation and System Assumption
4.3.2 MMCM's State Definition
4.3.3 Modeling Process of the MMCM
4.3.4 Model Validation
4.4 Analysis of AMHS Based on the MMCM
4.4.1 The Overall Utilization Ratio and the Mean Utilization Ratio of a
Vehicle
4.4.2 The Mean Arrival Time Interval of an Empty Vehicle
4.4.3 Expected Throughput Capability and Real Throughput Capability of
an AMHS
4.4.4 The Waiting Time of a Wafer
4.4.5 Vehicle Blockage-Related indicators
4.4.6 Case Study
4.5 Conclusion
References
5 Scheduling methods of automated material handling systems
in SWFSs
5.1 Heuristic Rules-Based Scheduling Methods
5.1.1 Heuristic Rules
5.1.2 Heuristic Rules Applied in AMHS Scheduling
5.2 Operation Research Theon/-Based Scheduling Methods
5.2.1 Operation Research Theory
5.3 Artificial Intelligence-Based Scheduling Methods
5.3.1 Artificial Intelligence Algorithms
5.3.2 Intelligent Algorithms Applied in AMHS Scheduling
5.4 Conclusion
References
6 Scheduling in Interbay automated material handling systems
6.1 Interbay Automated Material Handling Scheduling Problems
6.2 AMPHI-Based Interbay Automated Material Handling Scheduling
Methods
6.2.1 AMPHI-Based Interbay Automated Material Handling Scheduling
Model
6.2

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