《微机电系统基础(英文版)(第2版)》(作者刘昶)是经典原版书库之一,书中涵盖了MEMS技术的主要方面,同时引用了经典的MEMS研究论文和前沿的技术论文,为学生深入学习MEMS技术提供了指引。
《微机电系统基础(英文版)(第2版)》适合从事相关研究工作的人员参考阅读。
《微机电系统基础(英文版)(第2版)》(作者刘昶)全面论述了微机电系统(MEMS)的基础知识,涵盖了MEMS技术的主要方面,同时引用了经典的MEMS研究论文和前沿的技术论文,为学生深入学习MEMS技术提供了指引。书中提炼出了四个典型的传感器实例:惯性传感器、压力传感器、流量传感器和触觉传感器,并介绍了利用不同原理、材料和工艺制造这些传感器的方法,既便于比较,又可以启发学生的创新意识并提高创新能力。《微机电系统基础(英文版)(第2版)》被美国斯坦福大学、伊利诺伊大学等选为教材。
PREFACE
A NOTE TO INSTRUCTORS
NOTATIONAL CONVENTIONS
Chapter 1 Introduction
1.0 Preview
1.1 The History of MEMS Development
1.1.1 From the Beginning to 1990
1.1.2 From 1990 to 2001
1.1.3 2002 to Present
1.1.4 Future Trends
1.2 The Intrinsic Characteristics of MEMS
1.2.1 Miniaturization
1.2.2 Microelectronics Integration
1.2.3 Parallel Fabrication with Precision
1.3 Devices: Sensors and Actuators
1.3.1 Energy Domains and Transducers
1.3.2 Sensors Considerations
13.3 Sensor Noise and Design Complexity
1.3.4 Actuators Considerations
Summary
Problems
References
Chapter 2 First-Pass Introduction to Microfabrication
Chapter 3 Review of Essential Electrical and Mechanical Concepts
Chapter 4 Electrostatic Sensing and Actuation
Chapter 5 Thermal Sensing and Actuation
Chapter 6 Piezoresistive Sensors
Chapter 7 Piezoelectric Sensing and Actuation
Chapter 8 Magnetic Actuation
Chapter 9 Summary of Sensing and Actuation Methods
Chapter 10 Bulk Micromachining and Silicon Anisotropic Etching
Chapter 11 Surface Micromachining
Chapter 12 Process Synthesis: Putting It All Together
Chapter 13 Polymer MEMS
Chapter 14 Micro Fluidics Applications
Chapter 15 Case Studies of Selected MEMS Products
Appendix
Answers to Selected Problems
Index