纳米技术是当前科学研究与工业开发的热门领域之一。本书全面阐述了微纳器件的设计和制造方面的知识，以及在设计和制造时所要考虑的诸多因素。书中涵盖了多种制造技术，包括微纳制造技术、体和表面微加工技术、LiGA技术、薄膜沉积技术、纳加工技术等。

本书内容丰富，讲解透彻，是一本相关领域电子工程师、材料科研工作者开发微纳米材料应用的全面的指南，同时也可作为微纳米机械和微纳米技术专业研究生的参考书。

纳米技术是当前科学研究与工业开发的热门领域之一。本书全面阐述了微纳器件的设计和制造方面的知识，以及在设计和制造时所要考虑的诸多因素。书中涵盖了多种制造技术，包括微纳制造技术、体和表面微加工技术、LiGA技术、薄膜沉积技术、纳加工技术等。

Preface

1. Principles of Micro-and Nanofabrication

1.1  Introduction

1.2  Material Removal Rates

1.3  Conclusions

1.4  Problems

References

2. Microfabrication Using X-ray Lithography

2.1  Introduction

2.2  X- ray Lithography

2.3  Synchrotron Radiation

2.4  Microfabrication Process

2.5  Methods of Resist Application

2.6  Exposure

2.7  Problems

References

3. Manufacturing High Aspect Ratio Microstructures

3.1  I ntrod uction

3.2  Dry Etching

3.3  Plasma Etching Processes

3.4  Characteristics of the Plasma

3.5  Etching of Microstructures

3.6  Micromachining High Aspect Ratio

Microstructures

3.7  Micromolding

3.8  Micromolding Processes

3.9  Micromolding Tools

3.10 Micromold Design

3.11 MicromoldingApplications

3.12 Limitations of Micromolding

3.13 Fabrication of Moving Microstructures

3.14 Conclusions

3.15 Problems

References

4.  Meso-micromachining

4.1  Introduction

4.2  Size Effects in Micromachining

4.3  Mechanism for Large Plastic Flow

4.4  Inhomogeneous Microstrains

4.5  Origins of the Size Effect

4.6  Meso-machining Processes

4.7  Problems

References

5.  Mechanical Micromachining

5.1  Introduction

5.2  Microfluidic Systems

5.3  Theory of Micromachining

5.4  Experimental Micromachining

5.5  Micromachining Tool Design

5.6  High-Speed Air Turbine Spindles

5.7  Mechanical Design of Rotors

5.8  Discussion

5.9  Conclusions ,

5.10 Future Developments

5.11 Problems

References

6.  Microgrinding

6.1  Introduction

6.2  Grinding Wheels

6.3  Conventional Grinding Processes

6.4  Precision Grinding Processes

6.5  Ultra Precision Grinding

6.6  Conclusions

6.7  Problems

References

7.  Diamond Micro Cutting Tools

7.1  Introduction

7.2  Properties of Diamond

7.3  History of Diamond

7.4  CVD Diamond Technology

7.5  CVD Diamond Processes

7.6  Treatment of Substrate

7.7  Modification of HFCVD Process

7.8  Nucleation and Growth

7.9  Deposition on 3-D Substrates

7.10 Wear of Diamond

7.11 Time-Modulated CVD Diamond

7.12 Conclusions

7.13 Problems

References

8.  Laser Micro- and NanofabricaUon

6.1  Introduction

8.2  Laser Fundamentals

8.3  Laser Microfabrication

8.4  Laser Nanofabrication

8.5  Conclusions

8.6  Problems

References

9.  Micromachining Using Water Droplets

9.1  Introduction

9.2  Theory of Pulsed Liquid Impact

9.3  Impact by Water Drops

9.4  Modeling Machining Thresholds

9.5  Comparative Results

9.6  Material Removal Rates

9.7  Design of Water-Based Tools

9.8 Analysis of Space Frame

9.9  Mode Shapes of Tetrahedral Structure

9.10 Conclusions

9.11 Problems

References

10.  Diamond Nanogrinding

10.1 Introduction

10.2 Piezoelectric Nanogrinding

10.3 Stress Analysis in Nanogrinding Grains

10.4 Fracture Dominated Wear Model

10,5 Nanogrinding

10.6 Porous Nanogrinding Tools

10.7 Laser Dressing of Tools

10,8 Future Directions

10.9 Problems

References

11.  Nanomachining

11.1 Introduction

11.2 Nanometric machining

11.3 Theoretical Basis of Nanomachining

11.4 Implementation

11.5 Conclusions

11.6 Problems

References

12.  Micro- and Nanomanufacturing

12.1 Introduction

12.2 Micromanufacturing

12.3 Nanomanufacturing

12.4 Commercialization Issues of Micro and Nanotechnologies

12.5 Future Developments

12.6 Problems

References

Subject Index